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I. Equipment Overview:

LED chip alloy furnace equipment can be applied to integrated circuits, discrete components, LED chips, POWER, MEMS and other fields, suitable for oxidation, GPP, annealing, alloying and other processes of 4-6 inch LED chips.

Alloying process is carried out under high temperature conditions, using the principle of thermal alloying to implant impurity elements into the silicon substrate to the required depth, achieving specific concentration distribution to change the electrical properties of the material and form the structure of LED chips. It can be used to manufacture PN structure LED chips, resistors, capacitors, diodes and crystal tubes in integrated circuits.

II. Equipment Parameter Types:

III. Main Features and Advantages of the Equipment

1★ Powerful operation functions, Windows interface, display screen operation, users can conveniently modify process control parameters and display various process statuses in real time; equipped with fault self-diagnosis software, greatly saving maintenance time;

2★ Adopting reliable industrial computer + PLC mode, fully automatic control of furnace temperature, boat movement, gas flow, and valves, achieving full automation of the entire process;

3★ The program can realize manual/automatic operation. After power failure or intermediate shutdown, it can restart and manually heat up according to the process, saving process time;

4★ Equipped with multiple process pipelines for users to choose from;

5★ The cold end adopts PT100 to detect ambient temperature for temperature compensation, avoiding the impact of ambient temperature changes on furnace temperature and preventing interlayer interference;

6★ The boat movement control adopts high-speed pulse closed-loop control to avoid motor step loss and running vibration. After completing a cycle, the boat automatically calibrates its position to effectively prevent positioning deviation;

7★ Precise gas flow control, using analog signal closed-loop control, strong and weak electrical separation, various data interactions using standard buses, improving anti-interference ability and ensuring data safety; gas opening has soft start function;

8★ Equipped with multiple alarm functions and safety protection functions;
9★ Constant temperature zone automatic adjustment, cascade control, accurately controlling the actual process temperature of the reaction tube;